AFM
12¡° inch Wafer Industry Atomic Microscope-LSCL
Working mode: Tapping mode, contact mode
Optional mode: Friction, Phase, Magnetic or Electrostatic
Force curve: F-Z force curve, RMS-Z curve
XY scaning method: Sample approching method, close loop piezoelect translation stage
Z scanning method: Proble approching method
XY scanning range: close loop 100um¡Á100um
Z scanning range: 5um
Scanning resolution: close loop XY direction 0.5nm, Z direction 0.05nm
XY sample stage: Motor driver, moving accurate 1um
XY moving range: 100¡Á100mm (Optional 200¡Á200mm, 300¡Á300mm)
Sample stage: Dia 100mm (Optional 200mm, 300mm)
Sample weight¡Ü 0.5Kg
Z elevated bench: Motor driver control, min step 10nm
Z elevated bench travel range: 15mm (optional 20mm, 25mm)
Optical location: 5X len (optional 10X/20X)
Camera: 5mp digital CCD
Scanning rate: 0.6Hz-30Hz
Scanning angle: 0-360¡ã
Operation system: Windows XP/7/8/10
Interface: USB 2.0/3.0
Optional mode: Friction, Phase, Magnetic or Electrostatic
Force curve: F-Z force curve, RMS-Z curve
XY scaning method: Sample approching method, close loop piezoelect translation stage
Z scanning method: Proble approching method
XY scanning range: close loop 100um¡Á100um
Z scanning range: 5um
Scanning resolution: close loop XY direction 0.5nm, Z direction 0.05nm
XY sample stage: Motor driver, moving accurate 1um
XY moving range: 100¡Á100mm (Optional 200¡Á200mm, 300¡Á300mm)
Sample stage: Dia 100mm (Optional 200mm, 300mm)
Sample weight¡Ü 0.5Kg
Z elevated bench: Motor driver control, min step 10nm
Z elevated bench travel range: 15mm (optional 20mm, 25mm)
Optical location: 5X len (optional 10X/20X)
Camera: 5mp digital CCD
Scanning rate: 0.6Hz-30Hz
Scanning angle: 0-360¡ã
Operation system: Windows XP/7/8/10
Interface: USB 2.0/3.0
Three-axis independent closed-loop voltage level shift scanning table to achieve large-scale high-precision scanning;
Three-axis independent scanning, XYZ does not affect each other, very suitable for three-dimensional material and topography detection;
Motorized control of the sample moving table and lifting table, which can be arbitrarily programmed for multiple positions to realize rapid automatic detection;
Gantry type scanning head design, marble base, vacuum adsorption and magnetic adsorption stage;
The motor is automatically controlled by the intelligent needle insertion method with piezoelectric ceramic automatic detection to protect the probe and sample;
High-power assisted optical microscopy positioning, real-time observation and positioning of the probe and sample scanning area;
The closed-loop piezoelectric scanning stage does not require nonlinear correction, and the nanometer characterization and measurement accuracy is better than 99.5%.
Three-axis independent scanning, XYZ does not affect each other, very suitable for three-dimensional material and topography detection;
Motorized control of the sample moving table and lifting table, which can be arbitrarily programmed for multiple positions to realize rapid automatic detection;
Gantry type scanning head design, marble base, vacuum adsorption and magnetic adsorption stage;
The motor is automatically controlled by the intelligent needle insertion method with piezoelectric ceramic automatic detection to protect the probe and sample;
High-power assisted optical microscopy positioning, real-time observation and positioning of the probe and sample scanning area;
The closed-loop piezoelectric scanning stage does not require nonlinear correction, and the nanometer characterization and measurement accuracy is better than 99.5%.
PRODUCTS
DISTRIBUTOR
Contact
Suzhou Flyingman Precision Instruments Co., Ltd
Add: No.12, Huatuo Rd, SND,
Suzhou City, Jiangsu Province, China
Tel:(86)0512-66076021-8016
Fax:(86)0512-66076020
Mobile:(86)15371866886
Email: led_fluorescence@fsmprecision.com
Copyright 2019 - Fsmprecision
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