1. Single scanner allows any kind of scanning mode, including high resolution and large range scanning. 
2. The "scan-by-tip" method keeps the sample at rest  during scanning. Fast scanning is not affected by the sample inertia.
3. Smart auto vertical approaching method: uniaxial motor moves the sample vertically approaching the probe to making precise the positioning of the scanning range. The probe can¡¯t approach to sample , it is un-able to triaxial or three point moving probe to sample either
4. High-resolution optical microscope£¬standard 5X¡¢10X¡¢20X¡¢50X long working distance achromatic lens£¬max optical resolution 0.55um, polarizing filters available,11.6 inch high resolution monitor with measurement system.
5. Scan head and sample stage are designed with strong anti-vibration performance., and equipped with air float anti-vibration table.
6. Scanning rate 0.6Hz~4.34Hz£¬scanning angle 0~360¡ã¡£ ¡°XY rate¡± technical supports 1x/2x/4x/8x fast scanning mode..
7. Multi-image capture and monitor in real- time. Watching the cross-section real time. Supporting mouse controlled scanning range, translation and cutting..
8.ntegrated piezoelectric scanner hardware (nonlinear correction editor and electronic controller automatic correction function) provides nanometer characterization and measurement accuracy better than 98%.